×
Stay dedicated because great things takes time.
--Your friends at LectureNotes
Close

Micro Electro Mechanical System

  • Seminar ppt
  • 156 Views
  • 1 Offline Downloads
  • Uploaded 1 year ago
0 User(s)
Download PDFOrder Printed Copy

Share it with your friends

Leave your Comments

Text from page-1

One hour lecture presentation on Micro Electro Mechanical Systems (2nd Semester, M-Tech.) by 1 Mr. Upesh Patel, EN, PCE, NAGPUR.

Text from page-2

TOPIC - MINIATURIZATION AND MICROMACHINING • Why miniaturization? • Design concepts of MEMS devices. • Microsensors and Microactuators. • What is Micromachining? • Bulk and surface micromachining. • Liga process. 2

Text from page-3

WHY MINIATURIZATION? • Smaller in size. (microscale i.e um). • Require less volume physical entity. • Very lower power consumption. • More sensitive to input variations. • Cheaper due to mass production. • Less invasive than larger devices. • Portability. 3

Text from page-4

DESIGN CONCEPT • MEMS have tiny mechanical components and supporting electrical circuitry on the same substrate (Microaccelerometer.) • The design of mechanical components are not possible by mechanical process such as drilling, machining, milling , forging, casting, welding. • The technology used to design minute mechanical components with using well established IC fabrication technology is called as Microfabrication or Micromachining. • The MEMS devices are batch manufactured same as complex IC CHIP in fabrication foundry. • The success of MEMS device depends upon how we can exploit the IC fabrication technology to design complex machine components on a single chip to form a complete system, output of which then can be further processed by other electronics circuitry to 4 achieve requirement.

Lecture Notes