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Note for Micro-Electro-Mechanical Systems - MEMS by Mohammed Imroz khan

  • Micro-Electro-Mechanical Systems - MEMS
  • Note
  • Electronics and Instrumentation Engineering
  • B.Tech
  • 10 Topics
  • 2714 Views
  • 65 Offline Downloads
  • Uploaded 6 months ago
Mohammed Imroz Khan
Mohammed Imroz Khan
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Micro-Electro-Mechanical Systems

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Overview

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What are MEMS? • Micro - Small size, microfabricated structures • Electro - Electrical signal /control ( In / Out ) • Mechanical - Mechanical functionality ( In / Out ) • Systems - Structures, Devices, Systems - Control

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What are MEMS? Tronics NMRC Bishnu Gogci, Sensors Product Division, Motorola

Lecture Notes