Note for VLSI Design - VLSI By jameer n

Topics ( 8 )

Text from page-1

N/P-Channel MOSFET Fabrication By Assoc. Prof Dr. Uda Hashim School of Microelectronic Enginnering KUKUM Test Insert and Scribe-line Metal 2 Passivation Planarisation AlSiCu Spacer BPSG FOX FOX LDD BF2 S/D Implant N-Well P-Well PMOS P+ Substrate As+ S/D Implant NMOS Arsenic Implant N-Well Capacitor 1

Text from page-2

The making of transistor • • • • • Circuit design Mask/layout design Mask making and artwork Fabrication process Device testing – for parametric and functional test • Packaging and Reliability Test 2

Text from page-3

Mask Design 3

Text from page-4

MOSFET Masking Step • • • • Mask 1: Source Drain Mask Mask 2: Gate Mask Mask 3: Contact mask Mask 4: Metallization Mask 4