MEMS & SOC, NOTES JUNCTION, MH-34, Upesh Patel
SUBJECT: MICRO ELECTROMECHANICAL SYSTEMS and SOC
8th Semester Electronics Engineering, PCE Nagpur.
RTM Nagpur University Syllabus
UNIT 1: Introduction to MEMS (06 Marks)
Benefits of Miniaturization, Types of MEMS: Optical MEMS, Bio- MEMS, RF- MEMS,
Micro-fluidics, Success Stories, Pressure sensor, Accelerometer, Micro-mirror TV Projector.
Q.1) Define of MEMS and short introductory description of MEMS.
Micro Electromechanical systems is the promising technology that considers micro
manufacturing of microscale transducers, actuators, probes, capacitors, inductors, valves,
gears, pumps, gyroscope, mirrors, switches, and other required microdevices.
Mems are the advanced product and equipment design concept. These are small and
integrated devices, which combines electronics, electrical as well as mechanical elements
to meet the control related functional requirements. Mems is the technology that can
manufacture capacitor and inductor as well as mechanical elements such as springs,
gears, beams, diaphragms, and other mechanical components wherever needed and
depending upon requirements.Not all the Mems devices need compulsorily electrical or
mechanical components but advance design approaches related to particular Mems
MEMS sensors combine electrical and
mechanical components into or on top of a single
chip - i.e. they are electro-mechanical sensors. In
this way, MEMS sensors represent a continuum
bridging electronic sensors at one end of the
spectrum, and mechanical sensors at the other.
The key criterion of a MEMS sensor however, is
that there are typically some elements with
mechanical functionality - i.e. an element that is
able to stretch, deflect, spin, rotate, or vibrate.
Micro Electro Mechanical Systems (MEMS)
describes both a type of device or sensor, and a
incorporate tiny devices with miniaturized mechanical structures typically ranging from 1100 µm (about the thickness of a human hair), whilst MEMS manufacturing processes
provide an alternative to conventional macro-scale machining and assembly techniques.
Also known as 'Microsystems' in Europe, and 'Micromachines' in Japan, MEMS
devices have come to the fore in recent years with the wide-scale adoption of MEMS
motion sensors by the automotive industry, and the growing use of accelerometers and
gyroscopes in consumer electronics. Perhaps the most well known consumer electronics
incorporating MEMS motion sensors include a number of the leading smart phones, and
microelectronics industry, and combines and
extends the conventional techniques developed
for integrated circuit (IC) processing with
MEMS-specific processes, to produce small
mechanical structures measuring in the
micrometer scale (one millionth of a meter). As
with IC fabrication, the majority of MEMS