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Micro-Electro-Mechanical Systems

by Mohammed Imroz KhanMohammed Imroz Khan
Type: NoteCourse: B.Tech Specialization: Electronics and Instrumentation EngineeringOffline Downloads: 12Views: 428Uploaded: 1 month ago

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Contributors

Mohammed Imroz Khan
Mohammed Imroz Khan
Micro-Electro-Mechanical Systems
What are MEMS? • Micro - Small size, microfabricated structures • Electro - Electrical signal /control ( In / Out ) • Mechanical - Mechanical functionality ( In / Out ) • Systems - Structures, Devices, Systems - Control
What are MEMS? Tronics NMRC Bishnu Gogci, Sensors Product Division, Motorola

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